非接触式电阻率/PN-All-in-one检测仪
· 操作简单、设计紧凑
· 插入wafer 后自动测量
· 简单更改测试方式可实现电阻率和表面电阻的量测
· *设置,通过JOG快捷调整
Non-contact sheet resistance /resistivity measurement instrument | |
1) All-in-one tool for simultaneous resistivity,thickness,and PN measurement 2) 5 sites measurement mode for resistivity and thickness(option) 3) Easy operation and compact design 4) Auto-measurement start by inserting a wafer under the sensor 5) Easy mode change of resistivity and sheet resistance measurement 6) Easy set up to measurement condition by JOG dial 7) 5 types of model for each measuring range Applications:Silicon wafer, GaAs (Epi), GaN, GaP, InP, ITO, Metal thin film, Solar cell (Silicon wafer, Thin film) |